These systems ensure that highly complex chips can be built ever more compact and thus more powerful. Silicon-based chips have become an indispensable part of everyday life. They can be found in computers, mobile phones, cars, wind turbines, etc..

We are very pleased that Nicole Smits is taking us on a journey and explaining why high purity is so important for ASML and how the purity requirements are determined and achieved in her opening lecture "High Purity Cleanliness at ASML". She can be seen on the 2nd day of parts2clean at 9:30 a.m. at the Expert Forum.

Nicole Smits works at ASML as a materials and conditioning engineer. Her main focus is on ensuring the cleanliness of the EUV machines.

To ASLM’s homepage

And we found this great demonstration on Youtube, take a look.

Program of the Expert Forum